Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)

Michael V. Williamson

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M03/46
2003

Advisor: Andrew R. Neureuther


BibTeX citation:

@phdthesis{Williamson:M03/46,
    Author = {Williamson, Michael V.},
    Title = {Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)},
    School = {EECS Department, University of California, Berkeley},
    Year = {2003},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2003/4182.html},
    Number = {UCB/ERL M03/46}
}

EndNote citation:

%0 Thesis
%A Williamson, Michael V.
%T Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)
%I EECS Department, University of California, Berkeley
%D 2003
%@ UCB/ERL M03/46
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2003/4182.html
%F Williamson:M03/46