Electrical Engineering and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)

Michael V. Williamson

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M03/46
2003

Advisor: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Williamson:M03/46,
    Author = {Williamson, Michael V.},
    Title = {Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)},
    School = {EECS Department, University of California, Berkeley},
    Year = {2003},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2003/4182.html},
    Number = {UCB/ERL M03/46}
}

EndNote citation:

%0 Thesis
%A Williamson, Michael V.
%T Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)
%I EECS Department, University of California, Berkeley
%D 2003
%@ UCB/ERL M03/46
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2003/4182.html
%F Williamson:M03/46