An Algebraic Geometric Approach to the Identification of Linear Hybrid Systems. Tomography as a Metrology Technique for Semiconductor Manufacturing
R. Vidaland, S. Soatto, S. Shankar Sastry and M. V. P. Kruger
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M03/10
2003
BibTeX citation:
@techreport{Vidaland:M03/10,
Author = {Vidaland, R. and Soatto, S. and Sastry, S. Shankar and Kruger, M. V. P.},
Title = {An Algebraic Geometric Approach to the Identification of Linear Hybrid Systems. Tomography as a Metrology Technique for Semiconductor Manufacturing},
Institution = {EECS Department, University of California, Berkeley},
Year = {2003},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2003/4068.html},
Number = {UCB/ERL M03/10}
}
EndNote citation:
%0 Report %A Vidaland, R. %A Soatto, S. %A Sastry, S. Shankar %A Kruger, M. V. P. %T An Algebraic Geometric Approach to the Identification of Linear Hybrid Systems. Tomography as a Metrology Technique for Semiconductor Manufacturing %I EECS Department, University of California, Berkeley %D 2003 %@ UCB/ERL M03/10 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2003/4068.html %F Vidaland:M03/10