# An Algebraic Geometric Approach to the Identification of Linear Hybrid Systems. Tomography as a Metrology Technique for Semiconductor Manufacturing

### R. Vidaland, S. Soatto, S. Shankar Sastry and M. V. P. Kruger

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EECS Department

University of California, Berkeley

Technical Report No. UCB/ERL M03/10

2003

BibTeX citation:

@techreport{Vidaland:M03/10, Author = {Vidaland, R. and Soatto, S. and Sastry, S. Shankar and Kruger, M. V. P.}, Title = {An Algebraic Geometric Approach to the Identification of Linear Hybrid Systems. Tomography as a Metrology Technique for Semiconductor Manufacturing}, Institution = {EECS Department, University of California, Berkeley}, Year = {2003}, URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2003/4068.html}, Number = {UCB/ERL M03/10} }

EndNote citation:

%0 Report %A Vidaland, R. %A Soatto, S. %A Sastry, S. Shankar %A Kruger, M. V. P. %T An Algebraic Geometric Approach to the Identification of Linear Hybrid Systems. Tomography as a Metrology Technique for Semiconductor Manufacturing %I EECS Department, University of California, Berkeley %D 2003 %@ UCB/ERL M03/10 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2003/4068.html %F Vidaland:M03/10