Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

An Algebraic Geometric Approach to the Identification of Linear Hybrid Systems. Tomography as a Metrology Technique for Semiconductor Manufacturing

R. Vidaland, S. Soatto, S. Shankar Sastry and M. V. P. Kruger

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M03/10
2003


BibTeX citation:

@techreport{Vidaland:M03/10,
    Author = {Vidaland, R. and Soatto, S. and Sastry, S. Shankar and Kruger, M. V. P.},
    Title = {An Algebraic Geometric Approach to the Identification of Linear Hybrid Systems. Tomography as a Metrology Technique for Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2003},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2003/4068.html},
    Number = {UCB/ERL M03/10}
}

EndNote citation:

%0 Report
%A Vidaland, R.
%A Soatto, S.
%A Sastry, S. Shankar
%A Kruger, M. V. P.
%T An Algebraic Geometric Approach to the Identification of Linear Hybrid Systems. Tomography as a Metrology Technique for Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 2003
%@ UCB/ERL M03/10
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2003/4068.html
%F Vidaland:M03/10