Tomography as a Metrology Technique for Semiconductor Manufacturing

Michiel Victor Paul Kruger

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M03/11
April 2003

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/ERL-03-11.pdf

BibTeX citation:

@techreport{Kruger:M03/11,
    Author = {Kruger, Michiel Victor Paul},
    Title = {Tomography as a Metrology Technique for Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2003},
    Month = {Apr},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/28947.html},
    Number = {UCB/ERL M03/11}
}

EndNote citation:

%0 Report
%A Kruger, Michiel Victor Paul
%T Tomography as a Metrology Technique for Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 2003
%@ UCB/ERL M03/11
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/28947.html
%F Kruger:M03/11