Characterization of Systematic Spatial Variation in Photolithography

J. P. Cain

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/43
December 2002

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/ERL-02-43.pdf

BibTeX citation:

@techreport{Cain:M02/43,
    Author = {Cain, J. P.},
    Title = {Characterization of Systematic Spatial Variation in Photolithography},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2002},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4043.html},
    Number = {UCB/ERL M02/43}
}

EndNote citation:

%0 Report
%A Cain, J. P.
%T Characterization of Systematic Spatial Variation in Photolithography
%I EECS Department, University of California, Berkeley
%D 2002
%@ UCB/ERL M02/43
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4043.html
%F Cain:M02/43