Characterization of Systematic Spatial Variation in Photolithography
J. P. Cain
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/43
2002
BibTeX citation:
@techreport{Cain:M02/43,
Author = {J. P. Cain},
Title = {Characterization of Systematic Spatial Variation in Photolithography},
Institution = {EECS Department, University of California, Berkeley},
Year = {2002},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/4043.html},
Number = {UCB/ERL M02/43}
}
EndNote citation:
%0 Report %A Cain, J. P. %T Characterization of Systematic Spatial Variation in Photolithography %I EECS Department, University of California, Berkeley %D 2002 %@ UCB/ERL M02/43 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/4043.html %F Cain:M02/43