Six-Inch CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory
L. Voros and S. Parsa
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/39
2002
BibTeX citation:
@techreport{Voros:M02/39,
Author = {L. Voros and S. Parsa},
Title = {Six-Inch CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory},
Institution = {EECS Department, University of California, Berkeley},
Year = {2002},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/4038.html},
Number = {UCB/ERL M02/39}
}
EndNote citation:
%0 Report %A Voros, L. %A Parsa, S. %T Six-Inch CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory %I EECS Department, University of California, Berkeley %D 2002 %@ UCB/ERL M02/39 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/4038.html %F Voros:M02/39