Causal Analysis of Systematic Spatial Variation in Optical Lithography
Haolin Zhang
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/27
2002
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Zhang:M02/27,
Author = {Zhang, Haolin},
Title = {Causal Analysis of Systematic Spatial Variation in Optical Lithography},
School = {EECS Department, University of California, Berkeley},
Year = {2002},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/4012.html},
Number = {UCB/ERL M02/27}
}
EndNote citation:
%0 Thesis %A Zhang, Haolin %T Causal Analysis of Systematic Spatial Variation in Optical Lithography %I EECS Department, University of California, Berkeley %D 2002 %@ UCB/ERL M02/27 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/4012.html %F Zhang:M02/27