Causal Analysis of Systematic Spatial Variation in Optical Lithography

Haolin Zhang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/27
2002

Advisor: Costas J. Spanos


BibTeX citation:

@phdthesis{Zhang:M02/27,
    Author = {Zhang, Haolin},
    Title = {Causal Analysis of Systematic Spatial Variation in Optical Lithography},
    School = {EECS Department, University of California, Berkeley},
    Year = {2002},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/4012.html},
    Number = {UCB/ERL M02/27}
}

EndNote citation:

%0 Thesis
%A Zhang, Haolin
%T Causal Analysis of Systematic Spatial Variation in Optical Lithography
%I EECS Department, University of California, Berkeley
%D 2002
%@ UCB/ERL M02/27
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/4012.html
%F Zhang:M02/27