Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Causal Analysis of Systematic Spatial Variation in Optical Lithography

Haolin Zhang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/27
2002

Advisor: Costas J. Spanos


BibTeX citation:

@phdthesis{Zhang:M02/27,
    Author = {Zhang, Haolin},
    Title = {Causal Analysis of Systematic Spatial Variation in Optical Lithography},
    School = {EECS Department, University of California, Berkeley},
    Year = {2002},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/4012.html},
    Number = {UCB/ERL M02/27}
}

EndNote citation:

%0 Thesis
%A Zhang, Haolin
%T Causal Analysis of Systematic Spatial Variation in Optical Lithography
%I EECS Department, University of California, Berkeley
%D 2002
%@ UCB/ERL M02/27
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/4012.html
%F Zhang:M02/27