B. Wild
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/7
January 2002
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/ERL-02-7.pdf
BibTeX citation:
@techreport{Wild:M02/7, Author = {Wild, B.}, Title = {Data Handling Circuitry for Maskless Lithography Systems}, Institution = {EECS Department, University of California, Berkeley}, Year = {2002}, Month = {Jan}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/3967.html}, Number = {UCB/ERL M02/7} }
EndNote citation:
%0 Report %A Wild, B. %T Data Handling Circuitry for Maskless Lithography Systems %I EECS Department, University of California, Berkeley %D 2002 %@ UCB/ERL M02/7 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/3967.html %F Wild:M02/7