Coulomb Interactions in High Throughput Electron Beam Lithography
B. Wu
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/4
2002
BibTeX citation:
@techreport{Wu:M02/4,
Author = {B. Wu},
Title = {Coulomb Interactions in High Throughput Electron Beam Lithography},
Institution = {EECS Department, University of California, Berkeley},
Year = {2002},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/3964.html},
Number = {UCB/ERL M02/4}
}
EndNote citation:
%0 Report %A Wu, B. %T Coulomb Interactions in High Throughput Electron Beam Lithography %I EECS Department, University of California, Berkeley %D 2002 %@ UCB/ERL M02/4 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/3964.html %F Wu:M02/4