Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Coulomb Interactions in High Throughput Electron Beam Lithography

B. Wu

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/4
2002


BibTeX citation:

@techreport{Wu:M02/4,
    Author = {Wu, B.},
    Title = {Coulomb Interactions in High Throughput Electron Beam Lithography},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2002},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/3964.html},
    Number = {UCB/ERL M02/4}
}

EndNote citation:

%0 Report
%A Wu, B.
%T Coulomb Interactions in High Throughput Electron Beam Lithography
%I EECS Department, University of California, Berkeley
%D 2002
%@ UCB/ERL M02/4
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2002/3964.html
%F Wu:M02/4