Equipment and process modeling and diagnostics in semiconductor manufacturing

Jiangxin Wang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/40
December 2001

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-40.pdf

BibTeX citation:

@techreport{Wang:M01/40,
    Author = {Wang, Jiangxin},
    Title = {Equipment and process modeling and diagnostics in semiconductor manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2001},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/9597.html},
    Number = {UCB/ERL M01/40}
}

EndNote citation:

%0 Report
%A Wang, Jiangxin
%T Equipment and process modeling and diagnostics in semiconductor manufacturing
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/40
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/9597.html
%F Wang:M01/40