Equipment and process modeling and diagnostics in semiconductor manufacturing
Jiangxin Wang
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/40
2001
BibTeX citation:
@techreport{Wang:M01/40,
Author = {Jiangxin Wang},
Title = {Equipment and process modeling and diagnostics in semiconductor manufacturing},
Institution = {EECS Department, University of California, Berkeley},
Year = {2001},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9597.html},
Number = {UCB/ERL M01/40}
}
EndNote citation:
%0 Report %A Wang, Jiangxin %T Equipment and process modeling and diagnostics in semiconductor manufacturing %I EECS Department, University of California, Berkeley %D 2001 %@ UCB/ERL M01/40 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9597.html %F Wang:M01/40