Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Equipment and process modeling and diagnostics in semiconductor manufacturing

Jiangxin Wang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/40
2001


BibTeX citation:

@techreport{Wang:M01/40,
    Author = {Wang, Jiangxin},
    Title = {Equipment and process modeling and diagnostics in semiconductor manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2001},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9597.html},
    Number = {UCB/ERL M01/40}
}

EndNote citation:

%0 Report
%A Wang, Jiangxin
%T Equipment and process modeling and diagnostics in semiconductor manufacturing
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/40
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9597.html
%F Wang:M01/40