Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Simulation tools for optical resist models STORM

Ebo Harry Croffie

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/29
2001


BibTeX citation:

@techreport{Croffie:M01/29,
    Author = {Croffie, Ebo Harry},
    Title = {Simulation tools for optical resist models STORM},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2001},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9589.html},
    Number = {UCB/ERL M01/29}
}

EndNote citation:

%0 Report
%A Croffie, Ebo Harry
%T Simulation tools for optical resist models STORM
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/29
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9589.html
%F Croffie:M01/29