The economic impact of metrology methods in semiconductor manufacturing

Jula Payman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/22
2001


BibTeX citation:

@mastersthesis{Payman:M01/22,
    Author = {Payman, Jula},
    Title = {The economic impact of metrology methods in semiconductor manufacturing},
    School = {EECS Department, University of California, Berkeley},
    Year = {2001},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9583.html},
    Number = {UCB/ERL M01/22}
}

EndNote citation:

%0 Thesis
%A Payman, Jula
%T The economic impact of metrology methods in semiconductor manufacturing
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/22
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9583.html
%F Payman:M01/22