The economic impact of metrology methods in semiconductor manufacturing
Jula Payman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/22
2001
BibTeX citation:
@mastersthesis{Payman:M01/22,
Author = {Jula Payman},
Title = {The economic impact of metrology methods in semiconductor manufacturing},
School = {EECS Department, University of California, Berkeley},
Year = {2001},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9583.html},
Number = {UCB/ERL M01/22}
}
EndNote citation:
%0 Thesis %A Payman, Jula %T The economic impact of metrology methods in semiconductor manufacturing %I EECS Department, University of California, Berkeley %D 2001 %@ UCB/ERL M01/22 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9583.html %F Payman:M01/22