Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

The economic impact of metrology methods in semiconductor manufacturing

Jula Payman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/22
2001


BibTeX citation:

@mastersthesis{Payman:M01/22,
    Author = {Payman, Jula},
    Title = {The economic impact of metrology methods in semiconductor manufacturing},
    School = {EECS Department, University of California, Berkeley},
    Year = {2001},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9583.html},
    Number = {UCB/ERL M01/22}
}

EndNote citation:

%0 Thesis
%A Payman, Jula
%T The economic impact of metrology methods in semiconductor manufacturing
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/22
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/9583.html
%F Payman:M01/22