Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS
Yang Kyu Choi
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/38
2001
Advisor: Chenming Hu
BibTeX citation:
@phdthesis{Choi:M01/38,
Author = {Choi, Yang Kyu},
Title = {Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS},
School = {EECS Department, University of California, Berkeley},
Year = {2001},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/8148.html},
Number = {UCB/ERL M01/38}
}
EndNote citation:
%0 Thesis %A Choi, Yang Kyu %T Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS %I EECS Department, University of California, Berkeley %D 2001 %@ UCB/ERL M01/38 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/8148.html %F Choi:M01/38