Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Electromagnetic Simulation and Modeling with Applications in Lithography

Thomas V. Pistor

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/19
2001

Advisor: Andrew R. Neureuther


BibTeX citation:

@phdthesis{Pistor:M01/19,
    Author = {Pistor, Thomas V.},
    Title = {Electromagnetic Simulation and Modeling with Applications in Lithography},
    School = {EECS Department, University of California, Berkeley},
    Year = {2001},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/8126.html},
    Number = {UCB/ERL M01/19}
}

EndNote citation:

%0 Thesis
%A Pistor, Thomas V.
%T Electromagnetic Simulation and Modeling with Applications in Lithography
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/19
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2001/8126.html
%F Pistor:M01/19