C. Yun
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/5
December 2001
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-5.pdf
BibTeX citation:
@techreport{Yun:M01/5, Author = {Yun, C.}, Title = {Semiconductor Wafer Bonding and Ion-Cut Layer Transfer}, Institution = {EECS Department, University of California, Berkeley}, Year = {2001}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/3940.html}, Number = {UCB/ERL M01/5} }
EndNote citation:
%0 Report %A Yun, C. %T Semiconductor Wafer Bonding and Ion-Cut Layer Transfer %I EECS Department, University of California, Berkeley %D 2001 %@ UCB/ERL M01/5 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/3940.html %F Yun:M01/5