Process Variation Analysis for MEMS Design
L. Schenato, W-C. Wu, L.E. Ghaoui and Kristofer Pister
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/44
2000
BibTeX citation:
@techreport{Schenato:M00/44,
Author = {Schenato, L. and Wu, W-C. and Ghaoui, L.E. and Pister, Kristofer},
Title = {Process Variation Analysis for MEMS Design},
Institution = {EECS Department, University of California, Berkeley},
Year = {2000},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3875.html},
Number = {UCB/ERL M00/44}
}
EndNote citation:
%0 Report %A Schenato, L. %A Wu, W-C. %A Ghaoui, L.E. %A Pister, Kristofer %T Process Variation Analysis for MEMS Design %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/44 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3875.html %F Schenato:M00/44