Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Process Variation Analysis for MEMS Design

L. Schenato, W-C. Wu, L.E. Ghaoui and Kristofer Pister

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/44
2000


BibTeX citation:

@techreport{Schenato:M00/44,
    Author = {Schenato, L. and Wu, W-C. and Ghaoui, L.E. and Pister, Kristofer},
    Title = {Process Variation Analysis for MEMS Design},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3875.html},
    Number = {UCB/ERL M00/44}
}

EndNote citation:

%0 Report
%A Schenato, L.
%A Wu, W-C.
%A Ghaoui, L.E.
%A Pister, Kristofer
%T Process Variation Analysis for MEMS Design
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/44
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3875.html
%F Schenato:M00/44