Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Deep Submicron Photoresist Modeling and Parameter Extraction

J. Bao

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/28
2000


BibTeX citation:

@techreport{Bao:M00/28,
    Author = {Bao, J.},
    Title = {Deep Submicron Photoresist Modeling and Parameter Extraction},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3845.html},
    Number = {UCB/ERL M00/28}
}

EndNote citation:

%0 Report
%A Bao, J.
%T Deep Submicron Photoresist Modeling and Parameter Extraction
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/28
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3845.html
%F Bao:M00/28