The Impact of Line Edge Roughness on 100 nm MOSFET Devices
T.T. Nguyen
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/27
2000
BibTeX citation:
@techreport{Nguyen:M00/27,
Author = {Nguyen, T.T.},
Title = {The Impact of Line Edge Roughness on 100 nm MOSFET Devices},
Institution = {EECS Department, University of California, Berkeley},
Year = {2000},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3844.html},
Number = {UCB/ERL M00/27}
}
EndNote citation:
%0 Report %A Nguyen, T.T. %T The Impact of Line Edge Roughness on 100 nm MOSFET Devices %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/27 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3844.html %F Nguyen:M00/27