Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

The Impact of Line Edge Roughness on 100 nm MOSFET Devices

T.T. Nguyen

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/27
2000


BibTeX citation:

@techreport{Nguyen:M00/27,
    Author = {Nguyen, T.T.},
    Title = {The Impact of Line Edge Roughness on 100 nm MOSFET Devices},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3844.html},
    Number = {UCB/ERL M00/27}
}

EndNote citation:

%0 Report
%A Nguyen, T.T.
%T The Impact of Line Edge Roughness on 100 nm MOSFET Devices
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/27
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3844.html
%F Nguyen:M00/27