A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen
M. Roberto
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/24
2000
BibTeX citation:
@techreport{Roberto:M00/24,
Author = {M. Roberto},
Title = {A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen},
Institution = {EECS Department, University of California, Berkeley},
Year = {2000},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3841.html},
Number = {UCB/ERL M00/24}
}
EndNote citation:
%0 Report %A Roberto, M. %T A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/24 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3841.html %F Roberto:M00/24