A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen

M. Roberto

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/24
May 2000

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-24.pdf

BibTeX citation:

@techreport{Roberto:M00/24,
    Author = {Roberto, M.},
    Title = {A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3841.html},
    Number = {UCB/ERL M00/24}
}

EndNote citation:

%0 Report
%A Roberto, M.
%T A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/24
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3841.html
%F Roberto:M00/24