Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Effect of Metastable Atoms in RF Argon Discharges

M. Roberto

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/23
2000


BibTeX citation:

@techreport{Roberto:M00/23,
    Author = {Roberto, M.},
    Title = {Effect of Metastable Atoms in RF Argon Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3840.html},
    Number = {UCB/ERL M00/23}
}

EndNote citation:

%0 Report
%A Roberto, M.
%T Effect of Metastable Atoms in RF Argon Discharges
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/23
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3840.html
%F Roberto:M00/23