Effect of Metastable Atoms in RF Argon Discharges
M. Roberto
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/23
2000
BibTeX citation:
@techreport{Roberto:M00/23,
Author = {Roberto, M.},
Title = {Effect of Metastable Atoms in RF Argon Discharges},
Institution = {EECS Department, University of California, Berkeley},
Year = {2000},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3840.html},
Number = {UCB/ERL M00/23}
}
EndNote citation:
%0 Report %A Roberto, M. %T Effect of Metastable Atoms in RF Argon Discharges %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/23 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3840.html %F Roberto:M00/23