Effect of Metastable Atoms in RF Argon Discharges

M. Roberto

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/23
May 2000

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-23.pdf

BibTeX citation:

@techreport{Roberto:M00/23,
    Author = {Roberto, M.},
    Title = {Effect of Metastable Atoms in RF Argon Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3840.html},
    Number = {UCB/ERL M00/23}
}

EndNote citation:

%0 Report
%A Roberto, M.
%T Effect of Metastable Atoms in RF Argon Discharges
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/23
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3840.html
%F Roberto:M00/23