Electrical Engineering and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Stroboscopic Interferometer System for Dynamic MEMS Characterization

M.R. Hart, R.A. Conant, Kam Y. Lau and Richard S. Muller

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/18
2000

BibTeX citation:

@techreport{Hart:M00/18,
    Author = {Hart, M.R. and Conant, R.A. and Lau, Kam Y. and Muller, Richard S.},
    Title = {Stroboscopic Interferometer System for Dynamic MEMS Characterization},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3829.html},
    Number = {UCB/ERL M00/18}
}

EndNote citation:

%0 Report
%A Hart, M.R.
%A Conant, R.A.
%A Lau, Kam Y.
%A Muller, Richard S.
%T Stroboscopic Interferometer System for Dynamic MEMS Characterization
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/18
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3829.html
%F Hart:M00/18