Stroboscopic Interferometer System for Dynamic MEMS Characterization

M.R. Hart, R.A. Conant, Kam Y. Lau and Richard S. Muller

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/18
2000


BibTeX citation:

@techreport{Hart:M00/18,
    Author = {Hart, M.R. and Conant, R.A. and Lau, Kam Y. and Muller, Richard S.},
    Title = {Stroboscopic Interferometer System for Dynamic MEMS Characterization},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3829.html},
    Number = {UCB/ERL M00/18}
}

EndNote citation:

%0 Report
%A Hart, M.R.
%A Conant, R.A.
%A Lau, Kam Y.
%A Muller, Richard S.
%T Stroboscopic Interferometer System for Dynamic MEMS Characterization
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/18
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3829.html
%F Hart:M00/18