Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Autonomous Temperature Sensor for Semiconductor Processing

A. Gleckman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/6
2000


BibTeX citation:

@techreport{Gleckman:M00/6,
    Author = {Gleckman, A.},
    Title = {Autonomous Temperature Sensor for Semiconductor Processing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3808.html},
    Number = {UCB/ERL M00/6}
}

EndNote citation:

%0 Report
%A Gleckman, A.
%T Autonomous Temperature Sensor for Semiconductor Processing
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/6
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3808.html
%F Gleckman:M00/6