Autonomous Temperature Sensor for Semiconductor Processing
A. Gleckman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/6
2000
BibTeX citation:
@techreport{Gleckman:M00/6,
Author = {Gleckman, A.},
Title = {Autonomous Temperature Sensor for Semiconductor Processing},
Institution = {EECS Department, University of California, Berkeley},
Year = {2000},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3808.html},
Number = {UCB/ERL M00/6}
}
EndNote citation:
%0 Report %A Gleckman, A. %T Autonomous Temperature Sensor for Semiconductor Processing %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/6 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3808.html %F Gleckman:M00/6