Autonomous Temperature Sensor for Semiconductor Processing

A. Gleckman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/6
2000


BibTeX citation:

@techreport{Gleckman:M00/6,
    Author = {Gleckman, A.},
    Title = {Autonomous Temperature Sensor for Semiconductor Processing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3808.html},
    Number = {UCB/ERL M00/6}
}

EndNote citation:

%0 Report
%A Gleckman, A.
%T Autonomous Temperature Sensor for Semiconductor Processing
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/6
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3808.html
%F Gleckman:M00/6