Probabilistic Modeling for Fault Classification of Plasma Equipment
A. M. Ison
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/2
2000
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Ison:M00/2,
Author = {Ison, A. M.},
Title = {Probabilistic Modeling for Fault Classification of Plasma Equipment},
School = {EECS Department, University of California, Berkeley},
Year = {2000},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3801.html},
Number = {UCB/ERL M00/2}
}
EndNote citation:
%0 Thesis %A Ison, A. M. %T Probabilistic Modeling for Fault Classification of Plasma Equipment %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/2 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3801.html %F Ison:M00/2