Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Probabilistic Modeling for Fault Classification of Plasma Equipment

A. M. Ison

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/2
2000

Advisor: Costas J. Spanos


BibTeX citation:

@phdthesis{Ison:M00/2,
    Author = {Ison, A. M.},
    Title = {Probabilistic Modeling for Fault Classification of Plasma Equipment},
    School = {EECS Department, University of California, Berkeley},
    Year = {2000},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3801.html},
    Number = {UCB/ERL M00/2}
}

EndNote citation:

%0 Thesis
%A Ison, A. M.
%T Probabilistic Modeling for Fault Classification of Plasma Equipment
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/2
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2000/3801.html
%F Ison:M00/2