In-Situ Etch Rate Sensor Arrays for Plasma Etch Processes
M. Freed
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M99/28
1999
BibTeX citation:
@techreport{Freed:M99/28,
Author = {Freed, M.},
Title = {In-Situ Etch Rate Sensor Arrays for Plasma Etch Processes},
Institution = {EECS Department, University of California, Berkeley},
Year = {1999},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1999/3657.html},
Number = {UCB/ERL M99/28}
}
EndNote citation:
%0 Report %A Freed, M. %T In-Situ Etch Rate Sensor Arrays for Plasma Etch Processes %I EECS Department, University of California, Berkeley %D 1999 %@ UCB/ERL M99/28 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1999/3657.html %F Freed:M99/28