In-Situ Etch Rate Sensor Arrays for Plasma Etch Processes

M. Freed

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M99/28
May 1999

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/ERL-99-28.pdf

BibTeX citation:

@techreport{Freed:M99/28,
    Author = {Freed, M.},
    Title = {In-Situ Etch Rate Sensor Arrays for Plasma Etch Processes},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1999},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3657.html},
    Number = {UCB/ERL M99/28}
}

EndNote citation:

%0 Report
%A Freed, M.
%T In-Situ Etch Rate Sensor Arrays for Plasma Etch Processes
%I EECS Department, University of California, Berkeley
%D 1999
%@ UCB/ERL M99/28
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3657.html
%F Freed:M99/28