Moving Boundary Models and Methods for Deep Submicron Resist Process Simulation
E. Croffie
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M99/26
1999
BibTeX citation:
@techreport{Croffie:M99/26,
Author = {Croffie, E.},
Title = {Moving Boundary Models and Methods for Deep Submicron Resist Process Simulation},
Institution = {EECS Department, University of California, Berkeley},
Year = {1999},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1999/3655.html},
Number = {UCB/ERL M99/26}
}
EndNote citation:
%0 Report %A Croffie, E. %T Moving Boundary Models and Methods for Deep Submicron Resist Process Simulation %I EECS Department, University of California, Berkeley %D 1999 %@ UCB/ERL M99/26 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1999/3655.html %F Croffie:M99/26