Run to Run Control in Semiconductor Manufacturing

J. Musacchio

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M98/79
November 1998

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/ERL-98-79.pdf

BibTeX citation:

@techreport{Musacchio:M98/79,
    Author = {Musacchio, J.},
    Title = {Run to Run Control in Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1998},
    Month = {Nov},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3564.html},
    Number = {UCB/ERL M98/79}
}

EndNote citation:

%0 Report
%A Musacchio, J.
%T Run to Run Control in Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1998
%@ UCB/ERL M98/79
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3564.html
%F Musacchio:M98/79