Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Run to Run Control in Semiconductor Manufacturing

J. Musacchio

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M98/79
1998


BibTeX citation:

@techreport{Musacchio:M98/79,
    Author = {Musacchio, J.},
    Title = {Run to Run Control in Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1998},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1998/3564.html},
    Number = {UCB/ERL M98/79}
}

EndNote citation:

%0 Report
%A Musacchio, J.
%T Run to Run Control in Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1998
%@ UCB/ERL M98/79
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1998/3564.html
%F Musacchio:M98/79