Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Ion Energy Distributions in RF Sheaths; Review, Analysis and Simulation

E. Kawamura, V. Vahedi, Michael A. Lieberman and Charles K. (Ned) Birdsall

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M98/62
1998


BibTeX citation:

@techreport{Kawamura:M98/62,
    Author = {Kawamura, E. and Vahedi, V. and Lieberman, Michael A. and Birdsall, Charles K. (Ned)},
    Title = {Ion Energy Distributions in RF Sheaths; Review, Analysis and Simulation},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1998},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1998/3522.html},
    Number = {UCB/ERL M98/62}
}

EndNote citation:

%0 Report
%A Kawamura, E.
%A Vahedi, V.
%A Lieberman, Michael A.
%A Birdsall, Charles K. (Ned)
%T Ion Energy Distributions in RF Sheaths; Review, Analysis and Simulation
%I EECS Department, University of California, Berkeley
%D 1998
%@ UCB/ERL M98/62
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1998/3522.html
%F Kawamura:M98/62