Position Sensing for Electrostatic Micropositioners
Naiyavudhi Wongkomet
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M98/48
1998
Advisor: Bernhard E. Boser
BibTeX citation:
@phdthesis{Wongkomet:M98/48,
Author = {Wongkomet, Naiyavudhi},
Title = {Position Sensing for Electrostatic Micropositioners},
School = {EECS Department, University of California, Berkeley},
Year = {1998},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1998/3481.html},
Number = {UCB/ERL M98/48}
}
EndNote citation:
%0 Thesis %A Wongkomet, Naiyavudhi %T Position Sensing for Electrostatic Micropositioners %I EECS Department, University of California, Berkeley %D 1998 %@ UCB/ERL M98/48 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1998/3481.html %F Wongkomet:M98/48
