Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Characterization of Extreme Ultraviolet Imaging Systems

Edita Tejnil

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M97/81
1997

Advisor: Jeffrey Bokor


BibTeX citation:

@phdthesis{Tejnil:M97/81,
    Author = {Tejnil, Edita},
    Title = {Characterization of Extreme Ultraviolet Imaging Systems},
    School = {EECS Department, University of California, Berkeley},
    Year = {1997},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1997/3328.html},
    Number = {UCB/ERL M97/81}
}

EndNote citation:

%0 Thesis
%A Tejnil, Edita
%T Characterization of Extreme Ultraviolet Imaging Systems
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/81
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1997/3328.html
%F Tejnil:M97/81