Electrical Engineering and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

A Traveling Wave Driven, Inductively Coupled Large Area Plasma Source

Y. Wu and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M97/68
1997

BibTeX citation:

@techreport{Wu:M97/68,
    Author = {Wu, Y. and Lieberman, Michael A.},
    Title = {A Traveling Wave Driven, Inductively Coupled Large Area Plasma Source},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1997},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1997/3300.html},
    Number = {UCB/ERL M97/68}
}

EndNote citation:

%0 Report
%A Wu, Y.
%A Lieberman, Michael A.
%T A Traveling Wave Driven, Inductively Coupled Large Area Plasma Source
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/68
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1997/3300.html
%F Wu:M97/68