Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Propagation Effects of Partially Coherent Light in Optical Lithography and Inspection

Robert J. Socha

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M97/55
1997

Advisor: Andrew R. Neureuther


BibTeX citation:

@phdthesis{Socha:M97/55,
    Author = {Socha, Robert J.},
    Title = {Propagation Effects of Partially Coherent Light in Optical Lithography and Inspection},
    School = {EECS Department, University of California, Berkeley},
    Year = {1997},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1997/3273.html},
    Number = {UCB/ERL M97/55}
}

EndNote citation:

%0 Thesis
%A Socha, Robert J.
%T Propagation Effects of Partially Coherent Light in Optical Lithography and Inspection
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/55
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1997/3273.html
%F Socha:M97/55