Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Spin Coating for Rectangular Substrates

G.A. Luurtsema

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M97/49
1997


BibTeX citation:

@techreport{Luurtsema:M97/49,
    Author = {Luurtsema, G.A.},
    Title = {Spin Coating for Rectangular Substrates},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1997},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1997/3265.html},
    Number = {UCB/ERL M97/49}
}

EndNote citation:

%0 Report
%A Luurtsema, G.A.
%T Spin Coating for Rectangular Substrates
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/49
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1997/3265.html
%F Luurtsema:M97/49