Spin Coating for Rectangular Substrates

G.A. Luurtsema

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M97/49
1997


BibTeX citation:

@techreport{Luurtsema:M97/49,
    Author = {Luurtsema, G.A.},
    Title = {Spin Coating for Rectangular Substrates},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1997},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1997/3265.html},
    Number = {UCB/ERL M97/49}
}

EndNote citation:

%0 Report
%A Luurtsema, G.A.
%T Spin Coating for Rectangular Substrates
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/49
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1997/3265.html
%F Luurtsema:M97/49