Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

The Effect of Plasma Loading on Impedance as Observed in an Inductively Coupled Plasma Source

M. Wessels

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/49
1996


BibTeX citation:

@techreport{Wessels:M96/49,
    Author = {Wessels, M.},
    Title = {The Effect of Plasma Loading on Impedance as Observed in an Inductively Coupled Plasma Source},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1996},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3061.html},
    Number = {UCB/ERL M96/49}
}

EndNote citation:

%0 Report
%A Wessels, M.
%T The Effect of Plasma Loading on Impedance as Observed in an Inductively Coupled Plasma Source
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/49
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3061.html
%F Wessels:M96/49