Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences


UC Berkeley

Etching for Micromachining Processing

K.R. Williams and Richard S. Muller

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/37

BibTeX citation:

    Author = {Williams, K.R. and Muller, Richard S.},
    Title = {Etching for Micromachining Processing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1996},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3036.html},
    Number = {UCB/ERL M96/37}

EndNote citation:

%0 Report
%A Williams, K.R.
%A Muller, Richard S.
%T Etching for Micromachining Processing
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/37
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3036.html
%F Williams:M96/37