Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Photoresist Dissolution Mechanism Studies

A.M. Zenk

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/30
1996


BibTeX citation:

@techreport{Zenk:M96/30,
    Author = {Zenk, A.M.},
    Title = {Photoresist Dissolution Mechanism Studies},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1996},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3021.html},
    Number = {UCB/ERL M96/30}
}

EndNote citation:

%0 Report
%A Zenk, A.M.
%T Photoresist Dissolution Mechanism Studies
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/30
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3021.html
%F Zenk:M96/30