Photoresist Dissolution Mechanism Studies
A.M. Zenk
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/30
1996
BibTeX citation:
@techreport{Zenk:M96/30,
Author = {Zenk, A.M.},
Title = {Photoresist Dissolution Mechanism Studies},
Institution = {EECS Department, University of California, Berkeley},
Year = {1996},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3021.html},
Number = {UCB/ERL M96/30}
}
EndNote citation:
%0 Report %A Zenk, A.M. %T Photoresist Dissolution Mechanism Studies %I EECS Department, University of California, Berkeley %D 1996 %@ UCB/ERL M96/30 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3021.html %F Zenk:M96/30