Electrical Engineering and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Global Model for High Pressure Electronegative Radio-Frequency Discharges

Y.T. Lee, Michael A. Lieberman, Allan J. Lichtenberg, F. Bose, H. Baltes and R. Patrick

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/23
1996

BibTeX citation:

@techreport{Lee:M96/23,
    Author = {Lee, Y.T. and Lieberman, Michael A. and Lichtenberg, Allan J. and Bose, F. and Baltes, H. and Patrick, R.},
    Title = {Global Model for High Pressure Electronegative Radio-Frequency Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1996},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3008.html},
    Number = {UCB/ERL M96/23}
}

EndNote citation:

%0 Report
%A Lee, Y.T.
%A Lieberman, Michael A.
%A Lichtenberg, Allan J.
%A Bose, F.
%A Baltes, H.
%A Patrick, R.
%T Global Model for High Pressure Electronegative Radio-Frequency Discharges
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/23
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3008.html
%F Lee:M96/23