Global Model for High Pressure Electronegative Radio-Frequency Discharges
Y.T. Lee, Michael A. Lieberman, Allan J. Lichtenberg, F. Bose, H. Baltes and R. Patrick
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/23
1996
BibTeX citation:
@techreport{Lee:M96/23,
Author = {Y.T. Lee and Michael A. Lieberman and Allan J. Lichtenberg and F. Bose and H. Baltes and R. Patrick},
Title = {Global Model for High Pressure Electronegative Radio-Frequency Discharges},
Institution = {EECS Department, University of California, Berkeley},
Year = {1996},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3008.html},
Number = {UCB/ERL M96/23}
}
EndNote citation:
%0 Report %A Lee, Y.T. %A Lieberman, Michael A. %A Lichtenberg, Allan J. %A Bose, F. %A Baltes, H. %A Patrick, R. %T Global Model for High Pressure Electronegative Radio-Frequency Discharges %I EECS Department, University of California, Berkeley %D 1996 %@ UCB/ERL M96/23 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/3008.html %F Lee:M96/23