Electrical Engineering and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source

G. Gregori and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/14
1996

BibTeX citation:

@techreport{Gregori:M96/14,
    Author = {Gregori, G. and Lieberman, Michael A.},
    Title = {RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1996},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/2983.html},
    Number = {UCB/ERL M96/14}
}

EndNote citation:

%0 Report
%A Gregori, G.
%A Lieberman, Michael A.
%T RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/14
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/2983.html
%F Gregori:M96/14