RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source

G. Gregori and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/14
1996


BibTeX citation:

@techreport{Gregori:M96/14,
    Author = {Gregori, G. and Lieberman, Michael A.},
    Title = {RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1996},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/2983.html},
    Number = {UCB/ERL M96/14}
}

EndNote citation:

%0 Report
%A Gregori, G.
%A Lieberman, Michael A.
%T RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/14
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1996/2983.html
%F Gregori:M96/14