CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory
S. Fang
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/98
1995
BibTeX citation:
@techreport{Fang:M95/98,
Author = {S. Fang},
Title = {CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory},
Institution = {EECS Department, University of California, Berkeley},
Year = {1995},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2915.html},
Number = {UCB/ERL M95/98}
}
EndNote citation:
%0 Report %A Fang, S. %T CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/98 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2915.html %F Fang:M95/98