Modeling Electronegative Discharges at Low Pressure
I. Kouznetsov, Allan J. Lichtenberg and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/97
1995
BibTeX citation:
@techreport{Kouznetsov:M95/97,
Author = {Kouznetsov, I. and Lichtenberg, Allan J. and Lieberman, Michael A.},
Title = {Modeling Electronegative Discharges at Low Pressure},
Institution = {EECS Department, University of California, Berkeley},
Year = {1995},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2912.html},
Number = {UCB/ERL M95/97}
}
EndNote citation:
%0 Report %A Kouznetsov, I. %A Lichtenberg, Allan J. %A Lieberman, Michael A. %T Modeling Electronegative Discharges at Low Pressure %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/97 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2912.html %F Kouznetsov:M95/97
