Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding

P.I. Hagouel

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/72
August 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-72.pdf

BibTeX citation:

@techreport{Hagouel:M95/72,
    Author = {Hagouel, P.I.},
    Title = {Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Aug},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2858.html},
    Number = {UCB/ERL M95/72}
}

EndNote citation:

%0 Report
%A Hagouel, P.I.
%T Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/72
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2858.html
%F Hagouel:M95/72