Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding

P.I. Hagouel

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/72
1995


BibTeX citation:

@techreport{Hagouel:M95/72,
    Author = {Hagouel, P.I.},
    Title = {Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2858.html},
    Number = {UCB/ERL M95/72}
}

EndNote citation:

%0 Report
%A Hagouel, P.I.
%T Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/72
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2858.html
%F Hagouel:M95/72