Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding
P.I. Hagouel
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/72
1995
BibTeX citation:
@techreport{Hagouel:M95/72,
Author = {Hagouel, P.I.},
Title = {Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding},
Institution = {EECS Department, University of California, Berkeley},
Year = {1995},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2858.html},
Number = {UCB/ERL M95/72}
}
EndNote citation:
%0 Report %A Hagouel, P.I. %T Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/72 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2858.html %F Hagouel:M95/72