A Control and Diagnostic System for the Photolithography Process Sequence

Sovarong Leang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/69
1995

Advisor: Costas J. Spanos

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BibTeX citation:

@phdthesis{Leang:M95/69,
    Author = {Leang, Sovarong},
    Title = {A Control and Diagnostic System for the Photolithography Process Sequence},
    School = {EECS Department, University of California, Berkeley},
    Year = {1995},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2853.html},
    Number = {UCB/ERL M95/69}
}

EndNote citation:

%0 Thesis
%A Leang, Sovarong
%T A Control and Diagnostic System for the Photolithography Process Sequence
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/69
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2853.html
%F Leang:M95/69

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