Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Special Issues in Semiconductor Manufacturing

Costas J. Spanos, J. Chen, R. Chen, C. Fields, H. Huang, A. Ison, X. Niu, D. Park, J. Tao, M. Terrovitis and A. Wang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/64
1995


BibTeX citation:

@techreport{Spanos:M95/64,
    Author = {Spanos, Costas J. and Chen, J. and Chen, R. and Fields, C. and Huang, H. and Ison, A. and Niu, X. and Park, D. and Tao, J. and Terrovitis, M. and Wang, A.},
    Title = {Special Issues in Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2834.html},
    Number = {UCB/ERL M95/64}
}

EndNote citation:

%0 Report
%A Spanos, Costas J.
%A Chen, J.
%A Chen, R.
%A Fields, C.
%A Huang, H.
%A Ison, A.
%A Niu, X.
%A Park, D.
%A Tao, J.
%A Terrovitis, M.
%A Wang, A.
%T Special Issues in Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/64
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2834.html
%F Spanos:M95/64