Review of Ion Energy Distributions in Capacitively Coupled RF Plasma Reactors

E. Kawamura, V. Vahedi, Michael A. Lieberman and Charles K. (Ned) Birdsall

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/49
June 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-49.pdf

BibTeX citation:

@techreport{Kawamura:M95/49,
    Author = {Kawamura, E. and Vahedi, V. and Lieberman, Michael A. and Birdsall, Charles K. (Ned)},
    Title = {Review of Ion Energy Distributions in Capacitively Coupled RF Plasma Reactors},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2791.html},
    Number = {UCB/ERL M95/49}
}

EndNote citation:

%0 Report
%A Kawamura, E.
%A Vahedi, V.
%A Lieberman, Michael A.
%A Birdsall, Charles K. (Ned)
%T Review of Ion Energy Distributions in Capacitively Coupled RF Plasma Reactors
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/49
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2791.html
%F Kawamura:M95/49