Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Impedance Modeling of Cl_2/He Plasma Discharges

A.J. Miranda

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/31
1995


BibTeX citation:

@techreport{Miranda:M95/31,
    Author = {Miranda, A.J.},
    Title = {Impedance Modeling of Cl_2/He Plasma Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2764.html},
    Number = {UCB/ERL M95/31}
}

EndNote citation:

%0 Report
%A Miranda, A.J.
%T Impedance Modeling of Cl_2/He Plasma Discharges
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/31
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2764.html
%F Miranda:M95/31