Impedance Modeling of Cl_2/He Plasma Discharges
A.J. Miranda
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/31
1995
BibTeX citation:
@techreport{Miranda:M95/31,
Author = {Miranda, A.J.},
Title = {Impedance Modeling of Cl_2/He Plasma Discharges},
Institution = {EECS Department, University of California, Berkeley},
Year = {1995},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2764.html},
Number = {UCB/ERL M95/31}
}
EndNote citation:
%0 Report %A Miranda, A.J. %T Impedance Modeling of Cl_2/He Plasma Discharges %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/31 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2764.html %F Miranda:M95/31