A Comparison of Three Dimensional Photolithography Simulators
John J. Helmsen
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/25
1995
Advisor: Andrew R. Neureuther
BibTeX citation:
@phdthesis{Helmsen:M95/25,
Author = {Helmsen, John J.},
Title = {A Comparison of Three Dimensional Photolithography Simulators},
School = {EECS Department, University of California, Berkeley},
Year = {1995},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2751.html},
Number = {UCB/ERL M95/25}
}
EndNote citation:
%0 Thesis %A Helmsen, John J. %T A Comparison of Three Dimensional Photolithography Simulators %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/25 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2751.html %F Helmsen:M95/25