A Comparison of Three Dimensional Photolithography Simulators

John J. Helmsen

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/25
April 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-25.pdf

Advisor: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Helmsen:M95/25,
    Author = {Helmsen, John J.},
    Title = {A Comparison of Three Dimensional Photolithography Simulators},
    School = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Apr},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2751.html},
    Number = {UCB/ERL M95/25}
}

EndNote citation:

%0 Thesis
%A Helmsen, John J.
%T A Comparison of Three Dimensional Photolithography Simulators
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/25
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2751.html
%F Helmsen:M95/25