A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data
Raymond L. Chen
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/6
1995
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Chen:M95/6,
Author = {Chen, Raymond L.},
Title = {A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data},
School = {EECS Department, University of California, Berkeley},
Year = {1995},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2709.html},
Number = {UCB/ERL M95/6}
}
EndNote citation:
%0 Thesis %A Chen, Raymond L. %T A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/6 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2709.html %F Chen:M95/6