# A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data

### Raymond L. Chen

###
EECS Department

University of California, Berkeley

Technical Report No. UCB/ERL M95/6

1995

**Advisor:** Costas J. Spanos

BibTeX citation:

@phdthesis{Chen:M95/6, Author = {Chen, Raymond L.}, Title = {A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data}, School = {EECS Department, University of California, Berkeley}, Year = {1995}, URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2709.html}, Number = {UCB/ERL M95/6} }

EndNote citation:

%0 Thesis %A Chen, Raymond L. %T A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/6 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1995/2709.html %F Chen:M95/6