Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Semiconductor Equipment Analysis and Wafer State Prediction System Using Real-Time Signals

Sherry F. Lee

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/104
1994

Advisor: Costas J. Spanos


BibTeX citation:

@phdthesis{Lee:M94/104,
    Author = {Lee, Sherry F.},
    Title = {Semiconductor Equipment Analysis and Wafer State Prediction System Using Real-Time Signals},
    School = {EECS Department, University of California, Berkeley},
    Year = {1994},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2697.html},
    Number = {UCB/ERL M94/104}
}

EndNote citation:

%0 Thesis
%A Lee, Sherry F.
%T Semiconductor Equipment Analysis and Wafer State Prediction System Using Real-Time Signals
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/104
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2697.html
%F Lee:M94/104