Semiconductor Equipment Analysis and Wafer State Prediction System Using Real-Time Signals
Sherry F. Lee
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/104
1994
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Lee:M94/104,
Author = {Lee, Sherry F.},
Title = {Semiconductor Equipment Analysis and Wafer State Prediction System Using Real-Time Signals},
School = {EECS Department, University of California, Berkeley},
Year = {1994},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2697.html},
Number = {UCB/ERL M94/104}
}
EndNote citation:
%0 Thesis %A Lee, Sherry F. %T Semiconductor Equipment Analysis and Wafer State Prediction System Using Real-Time Signals %I EECS Department, University of California, Berkeley %D 1994 %@ UCB/ERL M94/104 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2697.html %F Lee:M94/104