The Application of Dynamic Specifications in a Multistep Lithographic Sequence

S-Y. Ma

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/84
1994

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BibTeX citation:

@techreport{Ma:M94/84,
    Author = {Ma, S-Y.},
    Title = {The Application of Dynamic Specifications in a Multistep Lithographic Sequence},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1994},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2647.html},
    Number = {UCB/ERL M94/84}
}

EndNote citation:

%0 Report
%A Ma, S-Y.
%T The Application of Dynamic Specifications in a Multistep Lithographic Sequence
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/84
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2647.html
%F Ma:M94/84

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