Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Sidewall Protection Mechanisms in Halocarbon and Halogen Discharges

D.L. Flamm

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/58
1994


BibTeX citation:

@techreport{Flamm:M94/58,
    Author = {Flamm, D.L.},
    Title = {Sidewall Protection Mechanisms in Halocarbon and Halogen Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1994},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2600.html},
    Number = {UCB/ERL M94/58}
}

EndNote citation:

%0 Report
%A Flamm, D.L.
%T Sidewall Protection Mechanisms in Halocarbon and Halogen Discharges
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/58
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2600.html
%F Flamm:M94/58