Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source

P.N. Wainman, Michael A. Lieberman, Allan J. Lichtenberg, R.A. Stewart and C. Lee

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/56
1994


BibTeX citation:

@techreport{Wainman:M94/56,
    Author = {Wainman, P.N. and Lieberman, Michael A. and Lichtenberg, Allan J. and Stewart, R.A. and Lee, C.},
    Title = {Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1994},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2594.html},
    Number = {UCB/ERL M94/56}
}

EndNote citation:

%0 Report
%A Wainman, P.N.
%A Lieberman, Michael A.
%A Lichtenberg, Allan J.
%A Stewart, R.A.
%A Lee, C.
%T Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/56
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2594.html
%F Wainman:M94/56