Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source
P.N. Wainman, Michael A. Lieberman, Allan J. Lichtenberg, R.A. Stewart and C. Lee
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/56
1994
BibTeX citation:
@techreport{Wainman:M94/56,
Author = {Wainman, P.N. and Lieberman, Michael A. and Lichtenberg, Allan J. and Stewart, R.A. and Lee, C.},
Title = {Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source},
Institution = {EECS Department, University of California, Berkeley},
Year = {1994},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2594.html},
Number = {UCB/ERL M94/56}
}
EndNote citation:
%0 Report %A Wainman, P.N. %A Lieberman, Michael A. %A Lichtenberg, Allan J. %A Stewart, R.A. %A Lee, C. %T Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source %I EECS Department, University of California, Berkeley %D 1994 %@ UCB/ERL M94/56 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2594.html %F Wainman:M94/56