Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas

S. Ashida, Michael A. Lieberman and C. Lee

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/50
1994


BibTeX citation:

@techreport{Ashida:M94/50,
    Author = {Ashida, S. and Lieberman, Michael A. and Lee, C.},
    Title = {Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1994},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2584.html},
    Number = {UCB/ERL M94/50}
}

EndNote citation:

%0 Report
%A Ashida, S.
%A Lieberman, Michael A.
%A Lee, C.
%T Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/50
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2584.html
%F Ashida:M94/50