Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas
S. Ashida, Michael A. Lieberman and C. Lee
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/50
1994
BibTeX citation:
@techreport{Ashida:M94/50,
Author = {Ashida, S. and Lieberman, Michael A. and Lee, C.},
Title = {Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas},
Institution = {EECS Department, University of California, Berkeley},
Year = {1994},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2584.html},
Number = {UCB/ERL M94/50}
}
EndNote citation:
%0 Report %A Ashida, S. %A Lieberman, Michael A. %A Lee, C. %T Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas %I EECS Department, University of California, Berkeley %D 1994 %@ UCB/ERL M94/50 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2584.html %F Ashida:M94/50